MEMS fabricated cochlea with frequency selectivity and acoustic/electric conversion

Tanujaya, Harto MEMS fabricated cochlea with frequency selectivity and acoustic/electric conversion. MEMS fabricated cochlea with frequency selectivity and acoustic/electric conversion.

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Abstract

In this paper, we report a novel piezoelectric artificial cochlea which works as an acoustic sensor with frequency selectivity. This system realizes the selectivity with the association of the local resonance of oscillation, the piezoelectric effect and the micro fabricated electrode array. The artificial cochlea is composed of a membrane of 40 µm-thick polyvinylidine d11luoride (PVDF) which is fixed on a substrate with a trapezoidal channel. The 1m.:mbrane over the channel works as a sensor and is oscillated by the acoustic wave. The width of the sensor is proportionally varied from 2 mm to 4 n.m along the 30 mm of longitudinal direction so as to change the local resonance frequency of the sensor with respect to the positinr. A detecting electrode array with 24-clemcnts is produced by aluminum thin film with 500 µmx I mm rectangle and I mm in spa.:e, where they are located in a center line of the trapezoidal channel. The measurements of the oscillating amplitude using a laser Doppler vibrometer reveal that the sensor has ,pecific vibration chahctcristics in response to the frequency from 3 kHz to 15 kHz. As the result of the vibration characteristics, the of the artificial cochlea is confirmed. piezoelectric output from the electrodes show the frequency selectivity. From these findings, the application feasibilit Keywords: fluid-strucrure interaction. acoustic sensor, cochlea, microelectromechanical systems

Item Type: Article
Subjects: Penelitian > Fakultas Teknik
Divisions: Fakultas Teknik > Teknik Mesin
Depositing User: Puskom untar untar
Date Deposited: 12 Mar 2021 04:03
Last Modified: 12 Mar 2021 04:03
URI: http://repository.untar.ac.id/id/eprint/14850

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